NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Collections About News Help Login
Back to Results
Growth and patterning of laser ablated superconducting YBa2Cu3O7 films on LaAlO3 substratesA high quality superconducting film on a substrate with a low dielectric constant is desired for passive microwave circuit applications. In addition, it is essential that the patterning process does not effect the superconducting properties of the thin films to achieve the highest circuit operating temperatures. YBa2Cu3O7 superconducting films were grown on lanthanum aluminate substrates using laser ablation with resulting maximum transition temperature (T sub c) of 90 K. The films were grown on a LaAlO3 which was at 775 C and in 170 mtorr of oxygen and slowly cooled to room temperature in 1 atm of oxygen. These films were then processed using photolithography and a negative photoresist with an etch solution of bromine and ethanol. Results are presented on the effect of the processing on T(sub c) of the film and the microwave properties of the patterned films.
Document ID
19900013105
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Warner, J. D. (NASA Lewis Research Center Cleveland, OH., United States)
Bhasin, K. B. (NASA Lewis Research Center Cleveland, OH., United States)
Varaljay, N. C. (NASA Lewis Research Center Cleveland, OH., United States)
Bohman, D. Y. (NASA Lewis Research Center Cleveland, OH., United States)
Chorey, C. M. (Sverdrup Technology, Inc., Cleveland OH., United States)
Date Acquired
September 6, 2013
Publication Date
January 1, 1989
Subject Category
Solid-State Physics
Report/Patent Number
E-5205
NAS 1.15:102436
NASA-TM-102436
Meeting Information
Meeting: National Symposium and Topical Conference
Location: Boston, MA
Country: United States
Start Date: October 23, 1989
End Date: October 27, 1989
Sponsors: American Vacuum Society
Accession Number
90N22421
Funding Number(s)
PROJECT: RTOP 307-51-00
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

Related Records

There are no records associated with this record.
No Preview Available