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Fabrication of lightweight Si/SiC LIDAR mirrorsA new, chemical vapor deposition (CVD) process was developed for fabricating lightweight, polycrystalline silicon/silicon-carbide (Si/SiC) mirrors. The process involves three CVD steps: (1) to produce the mirror faceplate; (2) to form the lightweight backstructure, which is deposited integral to the faceplate; and (3) to deposit a layer of optical-grade material, e.g., Si, onto the front surface of the faceplate. The mirror figure and finish are fabricated into the faceplate.
Document ID
19910020621
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Goela, Jitendra S.
(CVD, Inc. Woburn, MA, United States)
Taylor, Raymond L.
(CVD, Inc. Woburn, MA, United States)
Date Acquired
September 6, 2013
Publication Date
August 1, 1991
Subject Category
Optics
Report/Patent Number
NASA-CR-4389
CVD-TR-9081
NAS 1.26:4389
Accession Number
91N29935
Funding Number(s)
CONTRACT_GRANT: NAS1-18476
PROJECT: RTOP 992-35-15-06
CONTRACT_GRANT: SBIR-08.08-9243
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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