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Lateral spreading of Au contacts on InPThe contact spreading phenomenon observed when small area Au contacts on InP are annealed at temperatures above about 400 C was investigated. It was found that the rapid lateral expansion of the contact metallization which consumes large quantities of InP during growth is closely related to the third stage in the series of solid state reactions that occur between InP and Au, i.e., to the Au3In-to-Au9In4 transition. Detailed descriptions are presented of both the spreading process and the Au3In-to-Au9In4 transition along with arguments that the two processes are manifestations of the same basic phenomenon.
Document ID
19900013527
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Fatemi, Navid S.
(Sverdrup Technology, Inc., Cleveland OH., United States)
Weizer, Victor G.
(NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
September 6, 2013
Publication Date
January 1, 1990
Subject Category
Energy Production And Conversion
Report/Patent Number
E-5472
NASA-TM-103133
NAS 1.15:103133
Meeting Information
Meeting: 1990 Spring Meeting of the Materials Research Society
Location: San Francisco, CA
Country: United States
Start Date: April 16, 1990
End Date: April 21, 1990
Accession Number
90N22843
Funding Number(s)
CONTRACT_GRANT: NAS3-25266
PROJECT: RTOP 506-41-11
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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